Standard Multi-Pocket E-Guns

• Easily removable/replaceable top plate and crucible
• Side or bottom drive
• Multipocket crucibles are available in numerous configurations
• Continuous-trough carousels, crucibles with banana-shaped pockets, and ‘skillet’-type evaporant holders are also available with the 3CK and 2CK source
• Smaller crucibles are offered for the 1CK gun in 4x7cc and 6x4cc pocket configurations
• Power ratings: 1-12 kW (Model 3CK), 1-10 kW (Model 2CK) and 1-8 kW (Model 1CK)
• Enhanced crucible cooling improves thermal stability during evaporation
• Ultra-stable magnetics eliminate the need to regauss magnetic parts following source disassembly
• Adjustable internal and external polepiece extensions optimize beam spot control

Temescal Removable Cover SuperSource Specifications

Installation Requirements

Representative Deposition Rates

The chart below shows deposition rates obtained using Temescal sources such as the 2CK and the 3CK. Consult Temescal for detailed information on how deposition rate and uniformity are affected by source operating voltage, beam sweep and density, and other fundamental process variables.

Deposition Rates of Various Materials from Temescal Sources*

*25-cc pockets used in all tests. Source-to-substrate distance: 250 mm

Model 1CK Dimensions

Model 2CK Dimensions

Model 3CK Dimensions

When ordering a Temescal e-gun, you need to follow this process:

After selecting your source, crucible and cover, please select any accessories that you would like to add to your order.

Need More Information?

For product info or to request a quote, first select a part number and add the number of units you need to your request. When you're finished, click send request to complete the process and email your information request to Temescal.