All Single-Pocket Supersources
The following specifications apply to all three standard single-pocket SuperSources (SFIH-270-1, -2, and -3) as well as to the three UHV models (UHVC-270-1, -2, and -3).
1 Sources
2 Sources
3 Sources
Typical evaporation rate
25 kÅ/min. of Al; source power, 10 kW; source-to-substrate distance, 10 in. (254 mm)
35 kÅ/min. of Al; source power, 6–12 kW; source-to-substrate distance, 10 in. (254 mm)
50 kÅ/min. of Al; source, 12–20 kW; source-to-substrate distance, 10 in. (254 mm)
Max. power
10 kW at 10 kV
12 kW at 10 kV
20 kW at 10 kV
Emission current
0–1 A
0–1.4 A
0–2 A
Crucible capacity
7 cc
40 cc
156 cc
Weight
11.5 lbs. (5.2 kg)
14 lbs. (6.4 kg)
21 lbs. (9.5 kg)
Power Requirements
High voltage
4–10 kV dc at 0–1 A
4–10 kV dc at 0–1.4 A
4–10 kV dc at 0–2 A
Filament power
12 V ac at 50 A
12 V ac at 50 A
12 V ac at 75 A
Cooling Water Requirements
Inlet water lines
3/8-in. (9.5-mm) OD
3/8-in. (9.5-mm) OD
3/8-in. (9.5-mm) OD
Flow rate
Filtered, 3 gpm (11.4 l/m)
Filtered, 4 gpm (15.1 l/m)
Filtered, 5 gpm (18.9 l/m)
Max. inlet pressure
100 psig (7.0 kg/cm2) at
<70° F (<21° C)
100 psig (7.0 kg/cm2) at
<70° F (<21° C)
100 psig (7.0 kg/cm2) at
<70° F (<21° C)
Min. pressure differential
40 psig (2.8 kg/cm2)
40 psig (2.8 kg/cm2)
40 psig (2.8 kg/cm2)
Standard Single-Pocket Sources Only
The following specifications apply only to the three standard single-pocket sources (SFIH-270-1, -2, and -3).
Operating pressure
Maximum
5 X 10-4 torr (6.7 X 10-4 mbar)
Minimum
1 X 10-8 torr (1.33 X 10-8 mbar)
Feedthroughs
Two HV feedthroughs rated for 12 kV at 70 A
One octal feedthrough rated for 600 V at 15 A per lead
One dual-pass water feedthrough with 3/8-in. (9.5-mm) OD tub
UHS Sources Only
The following specifications apply only to the three UHV sources (UHVC-270-1, -2, and -3).
Flanges
1.33-in. Conflat, rotary
Bakeout temperature
395° F (200° C)
Temescal Single-Pocket SuperSources: Dimensions
