Now get everthing you want in a thin film deposition controller for single and multiple-layer processes. The XTC/3 with patented ModeLock provides proven mode hop prevention for consistent quality. With the XTC/3 Thin Film Deposition Controller, you get highly accurate control of deposition rate and thickness, the capacity for virtually any number of layers, easy installation and extremely high reliability to ensure productivity.
- Available in single-layer and multiple-layer models.
- Patented ModeLock technology prevents film thickness errors caused by mode-hopping.
- Supports Inficon Crystal 12™, CrystalSix® and dual sensor automatic crystal switching for maximum productivity.
- XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, 2 sensors and 2 sources.
- XTC/3S single-layer model supports up to 9 films, 2 sensors and 2 sources.
- Easy-to-read TFT LCD graphics displays.
- Films and processes can be assigned unique, descriptive names for easy retrieval.
- Ethernet connection available
- Free-standing (no computor necessary) or optional Windows® software for PC operation.
- Plug-and-play replacement for Inficon XTC/2 controllers (limited to XTC/2 features and command set).
Feature, Parameter, or Specification
XTC/3S Single Layer
XTC/3M Multiple Layer
Frequency Change Measurement Resolution
± 0.028 Hz
± 0.028 Hz
Measurement Interval
.25 seconds
.25 seconds
Thickness & Rate Resolution / Measurement
0.034 Angstroms @Tooling/density = 100,
fundamental frequency = 6 MHz
fundamental frequency = 6 MHz
0.034 Angstroms @Tooling/density = 100,
fundamental frequency = 6 MHz
fundamental frequency = 6 MHz
Measurement Technology
ModeLock
ModeLock
Number of Processes
1
99
Number of Layers
1
999
Number of Material Programs (or Films)
9
32
Number of Sensor Inputs
2 standard
2 standard
CrystalSix / Crystal 12 Sensor Support
Yes
Yes
Support XTAL2 Switch
Yes
Yes
Number of Source Outputs
2 standard
2 standard
Computer Communications
RS232 standard, Ethernet TCP/IP optional
RS232 standard, Ethernet TCP/IP optional
Max RS232 Baud Rate
115.2 Kbaud
115.2 Kbaud
Automatic Crystal Switch
Yes
Yes
Number of Relays
12 standard, Not Event Assignable
12 standard, Event Assignable
Number of Programmable Relay Functions
1
1
Functions per Relay
1
1
Relay Voltage Rating
30VDC or 30VAC RMS or 42V peak at 2.5 Amps
30VDC or 30VAC RMS or 42V peak at 2.5 Amps
Number of Inputs
8 TTL, 24VDC Max
8 TTL, 24VDC Max
Number of Programmable Input Functions
1, Not Event Assignable
1, Event Assignable
Number of Recorder Outputs
1
1
Manual Power / Hand Held Controller
Yes
Yes
Exhaust Fan
No Exhaust Fan
No Exhaust Fan
Test Mode
Yes
Yes
Shutter Delay
Yes
Yes
Secondary Tooling
Yes
Yes
Crystal Starting Frequency
6 MHz
6 MHz
Maximum Allowed Frequency Shift
1.0 MHz
1.0 MHz
Case Dimensions
half rack, 2U high
half rack, 2U high
Rate and Thickness Display Resolution
0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A
0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A
Film Select via Inputs
Yes
No
User Guide Languages
English, Chinese
English, Chinese
Control Loops
PID
PID
Software to Operate from PC
Yes
Yes
Datalogging
Yes
Yes
Quality and Stability Function
Yes
Yes
Sample and Hold (RateWatcher™ )
Yes
Yes
Crucible Selection
Yes
Yes
Crucible Feedback Input
Yes
Yes
Select Control Voltage Polarity
Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution
Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution
Program Lock Code
Yes
Yes
Display with Graphics
Yes
Yes
User Labeled Processes (cell phone style alphanumeric entry)
No
Yes
User Labeled Films (cell phone style alphanumeric entry)
No
Yes
Transfer Sensor Control
Yes
Yes
XTC/2 RS232 Communications Compatibility
Yes (limited)
Yes (limited)
