The IC/5 Thin Film Deposition Controller maximizes process capability and flexibility for evaporation and other physical vapor deposition (PVD) processes. Enhanced software and logic I/O features provide improved process control integration.
The IC/5 can store up to 50 processes and 250 total layers, and storage is unlimited with the floppy disk option. Its data logging capability stores layer and process data in convenient ASCII format for post-run analysis and process recipes for easy use retreival and loading.
